Beilstein J. Nanotechnol.2015,6, 451–461, doi:10.3762/bjnano.6.46
effects; magnetostriction; scanningprobemicroscopesandcomponents; Introduction
Since its invention in the 1980s [1] the atomic force microscope (AFM) became a versatile tool frequently used in nanoscale metrology, biosensing, maskless lithography and high density data storage with nearly as many
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Figure 1:
Schematic and photo of the setup including the optical beam deflection and the nested scanner desig...